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MEMS and NEMS
Language: en
Pages: 263
Authors: Sergey Edward Lyshevski
Categories: Technology & Engineering
Type: BOOK - Published: 2018-10-03 - Publisher: CRC Press

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The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every
Advanced MEMS/NEMS Fabrication and Sensors
Language: en
Pages: 312
Authors: Zhuoqing Yang
Categories: Technology & Engineering
Type: BOOK - Published: 2021-10-12 - Publisher: Springer Nature

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This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) an
Mems/Nems
Language: en
Pages: 2094
Authors: Cornelius T. Leondes
Categories: Technology & Engineering
Type: BOOK - Published: 2007-10-08 - Publisher: Springer Science & Business Media

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This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and t
Modeling MEMS and NEMS
Language: en
Pages: 382
Authors: John A. Pelesko
Categories: Mathematics
Type: BOOK - Published: 2002-11-25 - Publisher: CRC Press

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Designing small structures necessitates an a priori understanding of various device behaviors. The way to gain such understanding is to construct, analyze, and
MEMS/NEMS Sensors
Language: en
Pages: 242
Authors: Goutam Koley
Categories: Technology & Engineering
Type: BOOK - Published: 2019-11-20 - Publisher: MDPI

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Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly e